XuP-Semi
Transporting FOUPS in cleanrooms
Lifting system
4-axis positioning
White room
For millimetric pick and place on your fixed stations
Payload
15 kg
Autonomy
10 h
Tare weight
135 kg
Height
1,85 m
Application module
4-axis FOUP positioning system
Interface
Touch screen
Communication
Wi-Fi
Max. speed
1.35 m/s
Pick-up and removal height
0,92 m
Security
Laser scanners, sonars and emergency stops
Certification
CE | ISO 3691-4
Our options
Induction charging
Visual presence indicator (spotlight)
Optical transmitter
Application STMicroelectronics -Crolles
A fleet of 15 XuP-Semi accurately retrieve FOUPS from interface stations with the existing overhead transport system.
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